What settings were you using? It looks like high ISO when you should use low ISO and lots of light. Manual settings of AFMA are difficult. Lining up everything has to be accurate.
Try a image with the camera on a tripod, square to the chart with bright light, and Live view and Live focus. If the image is sharp, then you need a better AFMA.
FoCal will not only adjust AFMA, but it can test for consistent autofocus, which points to a lens issue. It will also help align the lens to the target so that you get consistent values. Its worth the price.