Canon's semiconductor equipment business is in even worse trouble than the imaging business.
Within the Industry and Others Business Unit, among semiconductor lithography equipment, while sales of i-line steppers remained at the same level as the previous year owing to demand for sensors and LED elements, sales volume overall decreased due to restrained capital expenditure for memory devices. As for flat-panel-display lithography equipment, unit sales decreased by half compared with the year-ago period due to sluggish demand for large-size LCD panels. Consequently, third-quarter sales for the segment decreased by 24.9%
And with the more modern smaller wavelength KrF and ArF, forming 60% of the market, where Canon hasn't achieved any market at all . Overall much the same story as camera sensors - failure to keep up with competitors' technology and thus declining market share.
it gives them another problem, if they move sensor production to smaller geometry nodes, they won't be using Canon photolithography equipment.
This graph are from Nikon and for the same equipment.