Your 100mm f/2 should be great, and so is the 60D, but, if you use raw, sharpening is going to be needed, the reason for using raw is that you can adjust the processing to your taste as opposed to jpeg which bakes it in.
As noted, focus accuracy is also a factor, even if you use manual focus. Check the focus accuracy of your lens, goggle autofocus tests to see the many different methods to see if you are front or rear focused.
Third, and very important is to set your lens aperture at the position where it is sharpest, and use bright light and a fast shutter speed. With a 60D and a 100mm lens use 1/200 or faster for still subjects. If you want it pixel perfect, I'd use 1/500 sec.
Your 100mm f/2 lens is typically sharpest at f/4 or f/5.6. f/5.6 is a pretty safe value for most lenses.
You might think a tripod is rock solid, but the head is usually a culprit too. Even a $1200 tripod setup can move if not carefully setup.