Canon produces back-side illuminated CMOS sensors with 1.5 micron pixels (equivalent to 24,000x16,000 = 384MP on full-frame) for its compact cameras.
These are likely Sony sensors, as Canon does not have BSI technology.
Canon does not use it's own sensors for compacts ... except for the 12mp sensor in the S100/S110 and G15.
This is the sensor, based on which Chipworks concluded that Canon has a 180nm (FSI) process already.
The 180nm process should start making appearances in DSLRs soon.
It appears that parts
of the 6D sensor are already made on 180nm process, as vaguely confirmed by Canon Japan
- The newly developed CMOS sensor, introducing a process miniaturization in semiconductor process CMOS
It's interesting that Canon USA/Europe do not mention anything about that.
Based on the available info, though, I'd say that the 6D will end up having better image quality than the 5DIII.
Note that the rumors floating around are saying that only parts
of the 6D sensor are made on 180nm.
So, the 6D sensor is essentially a 180nm/500nm hybrid.
The question is, are the new APS-C sensors from Canon going to be fully made on 180nm?
If they are 180nm/500nm hybrids, performance might not be all that different from current sensors.
But if they are fully made on 180nm, they are certainly going to match/beat the current 16mp Sony sensors.