Are you sure that they are scratches? Unusual for micro fiber cloth to scratch.
Try this: remove the lens from the body, use a powerful vacuum cleaner (I've been using a Dyson on my 7D for the last year now), then make a ring with your thumb + forefinger and cover the lens mount with your hand, insert nozzle of vacuum into your hand (so contact is with your skin & not camera body). SUCKs every piece of dust out.
They may just be lines (traces) of dust left by the cleaning cloth, as that part of the viewfinder has ridges (not a flat surface), so it is entirely possible that your cleaning effort has left lines of dust, not scratches.